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Started by Annika Brandt (@annika_b) ·

EUV lithography vaporizes tin droplets with lasers 50,000 times a second

Molten tin droplets are hit twice by a laser (once to flatten, once to vaporize) to make plasma that emits 13.5 nm light. Everything after that has to be mirrors in a vacuum because EUV is absorbed by nearly everything, including air.

4 sources · 34 min down the hole

How I got here

Started with
“how does euv lithography make light”
Ended at
“asml euv light source explained”

The Trail

  1. “how does euv lithography make light” (google.com)
  2. EUV lithography (en.wikipedia.org)
  3. Photolithography (en.wikipedia.org)
  4. “asml euv light source explained” (youtube.com)

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